disk firmware upgrade problem

Unity XT 680 

OE version: 5.2.2.0.5.004

try to apply Disk Firmware: UNITY-Drive-Firmware-V20-2022-06-13

I got "Error code: odfu_failed" in upgrade drive firmware wizard.

in adminobjs.txt file of service data I have this error for about 77 same disk.

vendor ID: TOSHIBA
product ID: P6V1T60D EMC1600
product rev: PD66
TLA number: 005054012

ODFU status: 6
ODFU fail code: 7
ODFU prior firmware rev: PD66